Micromachined monolithic 3-axis gyroscope with single drive
US9246018B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 18, 2011 |
| Grant date | Jan 26, 2016 |
| Priority date | — |
| Expiry date | May 20, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0848
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This document discusses, among other things, a cap wafer and a via wafer configured to encapsulate a single proof-mass 3-axis gyroscope formed in an x-y plane of a device layer. The single proof-mass 3-axis gyroscope can include a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards an edge of the 3-axis gyroscope sensor, a central suspension system configured to suspend the 3-axis gyroscope from the single, central anchor, and a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 3-axis gyroscope about a z-axis normal to the x-y plane at a drive frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.