Starting substrate for semiconductor engineering having substrate-through connections and a method for making same
US9249009B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 19, 2012 |
| Grant date | Feb 2, 2016 |
| Priority date | — |
| Expiry date | Apr 25, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A substrate-through electrical connection (10) for connecting components on opposite sides of a substrate, and a method for making same. The connection includes a substrate-through via made from substrate material (10′). There is a trench (11) provided surrounding the via, the walls of the trench being coated with a layer of insulating material (12) and the trench (11) is filled with conductive or semi-conductive material (13). A doping region (15) for threshold voltage adjustment is provided in the via material in the surface of the inner trench wall between insulating material (12) and the material (10′) in the via. There are contacts (17′, 17″) to the via on opposite sides of the substrate, and a contact (18) to the conductive material (13) in the trench (11) so as to enable the application of a voltage to the conductive material (13).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.