Suspended getter material-based structure
US9260291B2 · kind B2 · utility
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5References
33Claims
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Key dates
| Filing date | Jun 29, 2009 |
| Grant date | Feb 16, 2016 |
| Priority date | — |
| Expiry date | Nov 16, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24612
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Getter structure comprising a substrate and at least one getter material-based layer mechanically connected to the substrate by means of at least one support, in which the surface of the support in contact with the substrate is smaller than the surface of a first face of the getter material layer, in which said first face is in contact with the support, and a second face of the getter material layer, opposite said first face is at least partially exposed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.