Patent · US Active

Suspended getter material-based structure

US9260291B2 · kind B2 · utility

0Cited by
5References
33Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 29, 2009
Grant dateFeb 16, 2016
Priority date
Expiry dateNov 16, 2030

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/24612
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

Getter structure comprising a substrate and at least one getter material-based layer mechanically connected to the substrate by means of at least one support, in which the surface of the support in contact with the substrate is smaller than the surface of a first face of the getter material layer, in which said first face is in contact with the support, and a second face of the getter material layer, opposite said first face is at least partially exposed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.