Patent · US Active

Carrier with hollow chamber and support structure therein

US9263357B2 · kind B2 · utility

4Cited by

2References

14Claims

0Family size

Assignee

Infineon Technologies Dresden GmbH & Co. KG · DE

Inventor

Steffen Bieselt · Wehlen, DE

Key dates

Filing date	Dec 6, 2013
Grant date	Feb 16, 2016
Priority date	—
Expiry date	Jan 27, 2034

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/13
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

According to various embodiments, a carrier may include: a hollow chamber spaced apart from a surface of the carrier; and at least one support structure within the hollow chamber connecting a first region of the carrier disposed over the hollow chamber with a second region of the carrier disposed below the hollow chamber, wherein at least a part of a surface of the at least one support structure is spaced apart from an inner surface of the hollow chamber, and wherein the at least one support structure includes an electrically insulating material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.