Apparatus for detecting organic compounds and apparatus for manufacturing display device using the same
US9267882B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2014 |
| Grant date | Feb 23, 2016 |
| Priority date | — |
| Expiry date | Aug 15, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/3504
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for detecting an organic compound and an apparatus for manufacturing a display device, the apparatus for detecting an organic compound including an infrared light emitting unit that irradiates infrared rays toward a gas-phase organic compound used as a process gas in an atmospheric pressure equipment; a first window that separates the organic compound from the infrared light emitting unit; an infrared detection unit that measures an infrared absorbance of the organic compound; and a second window that separates the organic compound from the infrared detection unit, wherein infrared absorption regions of the first window and the second window are different from an infrared absorption region of the organic compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.