Hun-Jung Yi
17Patents
6h-index
31Co-inventors
62Inventor score
Filing activity: Jul 12, 2000 → Mar 26, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7191545B2 | Apparatus to dry substrates | Electricity | 18 | Expired |
| US7556712B2 | Laser cleaning of backside of wafer for photolithographic processing | Electricity | 18 | Active |
| US6883248B2 | Apparatus for drying a substrate using an isopropyl alcohol vapor | Electricity | 9 | Expired |
| US6959823B2 | Wafer guides for processing semiconductor substrates | Emerging Cross-Sectional Technologies | 8 | Expired |
| US7351667B2 | Etching solution for silicon oxide method of manufacturing a semiconductor device using the same | Electricity | 7 | Active |
| US7943562B2 | Semiconductor substrate cleaning methods, and methods of manufacture using same | Chemistry; Metallurgy | 6 | Active |
| US6655042B2 | System and method for drying semiconductor substrate | Electricity | 6 | Expired |
| US7386944B2 | Method and apparatus for drying a wafer, and an apparatus for cleaning and drying a wafer | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7880138B2 | Apparatus and method for analyzing contaminants on wafer | Physics | 4 | Active |
| US6395144B1 | Method for treating toxic compounds-containing gas by non-thermal plasma | Performing Operations; Transporting | 3 | Expired |
| US8043974B2 | Semiconductor wet etchant and method of forming interconnection structure using the same | Electricity | 3 | Active |
| US7100306B2 | Wafer guides for processing semiconductor substrates | Emerging Cross-Sectional Technologies | 3 | Expired |
| US7520068B2 | Apparatus and method for drying semiconductor substrates | Electricity | 1 | Expired |
| US6905570B2 | Apparatus for manufacturing integrated circuit device | Electricity | 1 | Expired |
| US7959884B2 | Apparatus for purifying air and purifying method thereof | Emerging Cross-Sectional Technologies | 0 | Active |
| US8767203B2 | Plasma monitoring device using a cylindrical hollow electrode | Electricity | 0 | Active |
| US9267882B2 | Apparatus for detecting organic compounds and apparatus for manufacturing display device using the same | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.