Observation and analysis unit
US9268126B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 20, 2010 |
| Grant date | Feb 23, 2016 |
| Priority date | — |
| Expiry date | Jan 2, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/165
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An observation and analysis unit that magnifies an image of a sample and further accomplishes the evaluation and analysis thereof. The observation and analysis unit includes a light-microscopic device designed for the magnified imaging and optical evaluation of the sample and a sample analyzer that analyzes selected regions of the sample. The sample analyzer includes an electron source from which an electron beam can be directed to a region of the sample selected by use of the light-microscopic device. The sample analyzer further includes an X-ray detector designed to detect X-ray radiation generated by the interaction of the electron beam with the sample material. The unit further includes an actuation and evaluation unit that generates control commands for the light-microscopic device and the electron source and spectrally analyzes the X-ray radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.