Thin-film semiconductor optoelectronic device with textured front and/or back surface prepared from template layer and etching

US9269843B2 · kind B2 · utility

Assignee

• ALTA DEVICES, INC. · US

Inventors

• I-Kang Ding · Mountain View, US
• Brendan M. Kayes · Los Angeles, US
• Rose TWIST · San Jose, US
• Sylvia Spruytte · Palo Alto, US
• Feng-Ming Liu · Singapore, SG
• Gregg Higashi · San Jose, US
• Melissa Archer · Mountain View, US
• Gang He · Magnolia Trace, CA

Key dates

• Filing date: Aug 5, 2014
• Grant date: Feb 23, 2016
• Expiry date: Aug 5, 2034

Classification

• Technology area (CPC —): General

Abstract

A method for providing a textured layer in an optoelectronic device is disclosed. The method includes depositing a template layer on a first layer. The template layer has significant inhomogeneity either in thickness or in composition, or both, including the possibility of forming one or more islands to provide at least one textured surface of the island layer. The method also includes exposing the template layer and the first layer to an etching process to create or alter at least one textured surface. The altered at least one textured surface is operative to cause scattering of light.