Patent · US Active

Receiving device for receiving semiconductor substrates

US9278433B2 · kind B2 · utility

2Cited by

29References

10Claims

0Family size

Assignee

EV Group GmbH · AT

Inventors

Herbert Tiefenböck · Ried im Innkreis, AT
Jurgen Burggraf · Ried im Innkreis, AT
Stefan Pargfrieder · Reichenau, AT
Daniel Burgstaller · Ried im Innkreis, AT

Key dates

Filing date	Mar 31, 2010
Grant date	Mar 8, 2016
Priority date	—
Expiry date	Sep 12, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/6838
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A workholding fixture for holding flat semiconductor substrates with

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.