Patent assignee · AT · COMPANY

EV Group GmbH

29Patents
29Active
29Granted
47Portfolio score

Filing activity: Mar 13, 2009 → Apr 17, 2018 · 8 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US9381732B2 Device for stripping a product substrate from a carrier substrate Emerging Cross-Sectional Technologies 8 Active
US8443864B2 Device for stripping a wafer from a carrier Emerging Cross-Sectional Technologies 6 Active
US9061388B2 System having two oscillation components for machining a workpiece Emerging Cross-Sectional Technologies 5 Active
US9555479B2 Chuck adapted for automated coupling Emerging Cross-Sectional Technologies 3 Active
US8449716B2 Device and method for separating a substrate from a carrier substrate Emerging Cross-Sectional Technologies 3 Active
US8918989B2 Device for aligning and pre-fixing a wafer Emerging Cross-Sectional Technologies 3 Active
US9278433B2 Receiving device for receiving semiconductor substrates Electricity 2 Active
US8894807B2 Device and method for detaching a semiconductor wafer from a substrate Emerging Cross-Sectional Technologies 1 Active
US9738042B2 Die tool, device and method for producing a lens wafer Physics 1 Active
US9052422B2 Method and device for producing a microlens Physics 1 Active
US9138978B2 Device for separating a substrate from a carrier substrate Emerging Cross-Sectional Technologies 1 Active
US9272501B2 Device for detaching a product substrate off a carrier substrate Emerging Cross-Sectional Technologies 1 Active
US8597980B2 Method for bonding of chips on wafers Electricity 1 Active
US8714611B2 Handling device for handling of a wafer Electricity 1 Active
US9662846B2 Method and device for producing a lens wafer Performing Operations; Transporting 1 Active
US8603294B2 Method for stripping a wafer from a carrier Emerging Cross-Sectional Technologies 0 Active
US10279551B2 Method for producing a microlens Physics 0 Active
US8905111B2 Device for releasing an interconnect layer that provides connection between a carrier and a wafer Emerging Cross-Sectional Technologies 0 Active
US9771223B2 Device and method for processing of wafers Emerging Cross-Sectional Technologies 0 Active
US9381729B2 Device for detaching a product substrate off a carrier substrate Emerging Cross-Sectional Technologies 0 Active
US8828147B2 Device and method for loosening a polymer layer from a surface of a substrate Electricity 0 Active
US10668678B2 Die tool, device and method for producing a lens wafer Physics 0 Active
US8986496B2 Device and method for stripping a product substrate from a carrier substrate Emerging Cross-Sectional Technologies 0 Active
US9643366B2 Method and device for producing a lens wafer Performing Operations; Transporting 0 Active
US9751698B2 Device and method for processing wafers Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.