MEMS multi-axis gyroscope Z-axis electrode structure
US9278845B2 · kind B2 · utility
15Cited by
90References
15Claims
0Family size
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Key dates
| Filing date | Jan 31, 2013 |
| Grant date | Mar 8, 2016 |
| Priority date | — |
| Expiry date | Jan 8, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0154
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Various examples include microelectromechanical die for sensing motion that includes symmetrical proof-mass electrodes interdigitated with asymmetrical stator electrodes. Some of these examples include electrodes that are curved around an axis orthogonal to the plane in which the electrodes are disposed. An example provides vertical flexures coupling an inner gimbal to a proof-mass in a manner permitting flexure around a horizontal axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.