Micromachined monolithic 6-axis inertial sensor
US9278846B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 18, 2011 |
| Grant date | Mar 8, 2016 |
| Priority date | — |
| Expiry date | Nov 24, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The device layer of a 6-degrees-of-freedom (6-DOF) inertial measurement system can include a single proof-mass 6-axis inertial sensor formed in an x-y plane, the inertial sensor including: a main proof-mass section suspended about a single, central anchor; a central suspension system configured to suspend the 6-axis inertial sensor from the single, central anchor; and a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion. The drive electrode and the central suspension system are configured to oscillate the 6-axis inertial sensor about a z-axis normal to the x-y plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.