Patent · US Active

Coupling system

US9281223B2 · kind B2 · utility

265Cited by

28References

7Claims

0Family size

Assignee

National Institute of Advanced Industrial Science and Technology · JP

Inventor

Shiro Hara · Ushiku, JP

Key dates

Filing date	May 30, 2011
Grant date	Mar 8, 2016
Priority date	—
Expiry date	Jul 9, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67772
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

In a transfer system for wafers, etc., a coupling chamber corresponding to a port is formed only when a transfer box comes in tight contact with an apparatus as a transfer target in the transfer box is transferred into the apparatus, so that the transfer target will be transferred into the apparatus together with the coupling chamber, thereby simplifying the structures of the transfer box and apparatus and also allowing the transfer target to be transferred into the apparatus without fail.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.