Pressure sensor with built-in calibration capability
US9285289B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2013 |
| Grant date | Mar 15, 2016 |
| Priority date | — |
| Expiry date | Jun 23, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0264
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS pressure sensor (70) includes a sense cell (80), a test cell (82), and a seal structure (84). The test cell includes a test cavity (104), and the seal structure (84) is in communication with the test cavity, wherein the seal structure is configured to be breached to change an initial cavity pressure (51) within the test cavity (104) to ambient pressure (26). Calibration methodology (180) entails obtaining (184) a test signal (186) from the test cell prior to breaching the seal structure, and obtaining (194) another test signal (196) after the seal structure is breached. The test signals are used to calculate a sensitivity (200) of the test cell, the calculated sensitivity is used to estimate the sensitivity (204) of the sense cell, and the estimated sensitivity (204) can be used to calibrate the sense cell.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.