Apparatus and method for manufacturing substrates
US9285416B2 · kind B2 · utility
5Cited by
7References
19Claims
0Family size
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Key dates
| Filing date | Mar 13, 2013 |
| Grant date | Mar 15, 2016 |
| Priority date | — |
| Expiry date | Dec 14, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2808
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substrate manufacturing apparatus includes a test apparatus including a test handler module for performing a test process on a substrate. The test handler module may include a conveyor unit to transfer a substrate, a handler unit for performing a test process on the substrate, and a transfer unit for transferring the substrate between the conveyor unit and the handler unit. The conveyor unit may include a feed conveyor and a discharge conveyor spaced apart from the feed conveyor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.