Method of forming organic polymer thin film and an apparatus for forming the organic polymer thin film
US9290837B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 13, 2010 |
| Grant date | Mar 22, 2016 |
| Priority date | — |
| Expiry date | Dec 12, 2031 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/246
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A technique for forming an organic polymer thin film on a surface of a substrate with high film formation efficiency and excellent reproducibility and stability is provided. When a vacuum deposition polymerization for forming an organic polymer thin film is performed on a surface of a substrate repeatedly, in which a plurality of kinds of monomers evaporated in a plurality of evaporation source containers in vacuum state are introduced into a deposition chamber in a vacuum state and polymerized on a surface of the substrate arranged in the deposition chamber, each of the monomers in a liquid form is present in the evaporation source containers in a constant amount every time, at the beginning of the evaporation operation of monomers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.