Detection of defect in die
US9291576B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 11, 2014 |
| Grant date | Mar 22, 2016 |
| Priority date | — |
| Expiry date | Jul 11, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0612
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Generally discussed herein are systems, apparatuses, and methods that can detect a defect in a die. According to an example, a method can include transmitting a first beam of light with a wavelength and optical power configured to produce a reflected beam with at least one milli-Watt of power, linearly polarizing the first beam of light in a specific direction, circularly polarizing the linearly polarized light by a quarter wavelength to create circularly polarized light, directing the circularly polarized light to a device under test, linearly polarizing light reflected off the device under test by a quarter wavelength, or creating an image of the linearly polarized light reflected off the device under test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.