Tilt mode accelerometer with improved offset and noise performance
US9297825B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 5, 2013 |
| Grant date | Mar 29, 2016 |
| Priority date | — |
| Expiry date | Mar 1, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0834
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A single-axis tilt-mode microelectromechanical accelerometer structure. The structure includes a substrate having a top surface defined by a first end and a second end. Coupled to the substrate is a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot point on the substrate between the first end and the second end and a second asymmetrically-shaped mass suspended above the substrate pivotable about a second pivot point on the substrate between the first end and the second end. The structure also includes a first set of electrodes positioned on the substrate and below the first asymmetrically-shaped mass and a second set of electrodes positioned on the substrate and below the second asymmetrically-shaped mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.