Patent · US Active

Grating-assisted autofocus device and autofocusing method for an imaging device

US9297994B2 · kind B2 · utility

2Cited by

4References

31Claims

0Family size

Assignees

Carl Zeiss SMS Ltd. · IL
Carl Zeiss SMT GmbH · DE

Inventors

Sascha Perlitz · Jena, DE
Michael Arnz · Oberkochen, DE
Dirk Seidel · Jena, DE

Key dates

Filing date	Sep 7, 2012
Grant date	Mar 29, 2016
Priority date	—
Expiry date	May 7, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG02B21/245
WIPO fieldOptics
WIPO sectorInstruments

Abstract

There is provided an autofocus device for an imaging device which has an imaging lens system with a first focal plane, an object stage for holding an object and a first movement module for the relative movement of object stage and imaging lens system, wherein the autofocus device comprises an image-recording module with a second focal plane the position of which relative to the first focal plane is known,

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.