Wide metal-free plasma flood gun
US9299536B2 · kind B2 · utility
1Cited by
15References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 17, 2013 |
| Grant date | Mar 29, 2016 |
| Priority date | — |
| Expiry date | Jul 2, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32412
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In one embodiment an apparatus to provide electrons to a substrate includes a plurality of helicon plasma sources arranged in a helicon source array, wherein each helicon plasma source comprises a helical antenna configured to generate a wave vector parallel to a first axis; and a magnet configured to generate a magnetic field vector parallel to the first axis, wherein each helicon plasma source is further configured to generate a respective magnetic field vector that is opposite that of a magnetic field vector of an adjacent helicon plasma source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.