Method for deposition of high-performance coatings and encapsulated electronic devices

US9299956B2 · kind B2 · utility

Assignee

• Aixtron, Inc. · DE

Inventors

• Stephen E. Savas · Pleasanton, US
• Allan B. Wiesnoski · Pleasanton, US
• Hood Chatham · Fairfield, US
• Carl Galewski · Aromas, US

Key dates

• Filing date: Jun 13, 2013
• Grant date: Mar 29, 2016
• Expiry date: Feb 7, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K71/00

Abstract

A method is disclosed for forming leak-free coatings on polymeric or other surfaces that provide optical functions or protect underlying layers from exposure to oxygen and water vapor and do not crack or peel in outdoor environments. This method may include both cleaning and surface modification steps preceding coating. The combined method greatly reduces defects in any barrier layer and provides weatherability of coatings. Specific commercial applications that benefit from this include manufacturing of photovoltaic devices or organic light emitting diode (OLED) devices including lighting and displays.