Method for fabricating a magnetic writer using multiple etches of damascene materials
US9305583B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 16, 2014 |
| Grant date | Apr 5, 2016 |
| Priority date | — |
| Expiry date | May 16, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/3163
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method provides a magnetic transducer having an air-bearing surface (ABS) location. An intermediate layer that includes a first sublayer in a side shield region and a second sublayer outside of the side shield region is provided. A trench is formed in the intermediate layer using multiple etches. A first etch removes part of the second sublayer, providing a first portion of the trench having a first sidewall angle. A second etch removes part of the first sublayer, providing a second portion of the trench having a second sidewall angle. The second sidewall angle is greater than the first sidewall angle. A main pole is provided in the trench and has a plurality of sidewalls. The sidewalls have the second sidewall angle in the second portion of the trench and at least one main pole sidewall angle corresponding to the first sidewall angle in the first portion of the trench.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.