Pre-aligned nozzle/skimmer
US9305746B2 · kind B2 · utility
1Cited by
16References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 9, 2014 |
| Grant date | Apr 5, 2016 |
| Priority date | — |
| Expiry date | Dec 21, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of assembling a nozzle/skimmer module includes coupling a nozzle assembly and skimmer cartridge assembly in a rigid tandem configuration to more accurately control the formation of the Gas Cluster Ion Beam (GCIB). The nozzle/skimmer module is pre-aligned before installation in a production GCIB processing system to more accurately position the GCIB.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.