Inventor · Danvers, MA, US

Robert K. Becker

10Patents
3h-index
12Co-inventors
53Inventor score

Filing activity: Jul 9, 2001 → Jul 31, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US6676989B2 Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology Electricity 79 Expired
US7060988B2 Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system Electricity 6 Expired
US8097860B2 Multiple nozzle gas cluster ion beam processing system and method of operating Electricity 5 Active
US8304033B2 Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles Electricity 2 Active
US9029808B2 Low contamination scanner for GCIB system Electricity 2 Active
US8981322B2 Multiple nozzle gas cluster ion beam system Electricity 2 Active
US8338806B2 Gas cluster ion beam system with rapid gas switching apparatus Electricity 1 Active
US9305746B2 Pre-aligned nozzle/skimmer Emerging Cross-Sectional Technologies 1 Active
US9540725B2 Method and apparatus for beam deflection in a gas cluster ion beam system Electricity 0 Active
US9343259B2 GCIB nozzle assembly Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.