Patent · US Active

Micromechanical system and corresponding manufacturing method

US9309107B2 · kind B2 · utility

0Cited by

0References

7Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Jochen Reinmuth · Reutlingen, DE
Andreas Scheurle · Leonberg, DE
Christian Bierhoff · Reutlingen, DE

Key dates

Filing date	Mar 29, 2012
Grant date	Apr 12, 2016
Priority date	—
Expiry date	Oct 20, 2034

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/24851
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical system is described having a substrate; a first micromechanical functional area, which is situated above the substrate; a second micromechanical functional area, which is situated above the first micromechanical functional area and is connected via a first weblike anchoring structure to the first micromechanical functional area; a third micromechanical functional area, which is situated above the second micromechanical functional area, and which has a first subarea and a second subarea; the first subarea being connected via a second weblike anchoring structure to the second micromechanical functional area; and the second subarea being mounted floating over the substrate by the first subarea. The invention also provides a method for manufacturing such a micromechanical system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.