Scale for photoelectric encoder
US9310225B2 · kind B2 · utility
2Cited by
7References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 22, 2014 |
| Grant date | Apr 12, 2016 |
| Priority date | — |
| Expiry date | Jul 23, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/34746
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scale for a photoelectric encoder includes a scale substrate and a reflection film formed at a predetermined pitch on the scale substrate. A surface of the reflection film forms a reflection surface. A low-reflection surface is formed by etching the scale substrate between reflection films. Accordingly, a scale can be provided which is lower in cost and has favorable yield rates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.