Surface measurement instrument and calibration thereof
US9322631B2 · kind B2 · utility
1Cited by
2References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 1, 2011 |
| Grant date | Apr 26, 2016 |
| Priority date | — |
| Expiry date | Mar 13, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/312
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of calibrating a surface measurement instrument includes rotating a work piece having an undulating surface on a turntable of a metrological apparatus; measuring the surface of the work piece at a plurality of rotational positions; analyzing the results of the measurement to determine parameters describing an error causing characteristic of the metrological apparatus; and using the determined parameters to correct measurement data for the error causing characteristic of the metrological apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.