Nonpolymeric antireflection compositions containing adamantyl groups
US9328246B2 · kind B2 · utility
1Cited by
3References
18Claims
0Family size
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Key dates
| Filing date | Jan 17, 2013 |
| Grant date | May 3, 2016 |
| Priority date | — |
| Expiry date | Jan 17, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31529
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Nonpolymeric compounds, compositions, and methods for forming microelectronic structures, and the structures formed therefrom are provided. The nonpolymeric compounds are ring-opened, epoxide-adamantane derivatives that comprise at least two epoxy moieties and at least one adamantyl group, along with at least one chemical modification group, such as a chromophore, bonded to a respective epoxy moiety. Anti-reflective and/or planarization compositions can be formed using these compounds and used in lithographic processes, including fabrication of microelectronic structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.