Fluid control valve and mass flow controller
US9328826B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 26, 2013 |
| Grant date | May 3, 2016 |
| Priority date | — |
| Expiry date | Feb 18, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7759
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
In order to, in a short period of time, reduce to zero a measured flow rate value measured after fully closing a fluid control valve, the fluid control valve having a configuration suitable to decrease the inside volume of the fluid control valve is configured together with a valve element member, and a valve seat block provided with: an in-valve flow path that is formed inside of the valve seat block; and a valve seat surface that is brought into contact with or separated from a seating surface of the valve element member is provided with a cutout that is formed in a part of a protruded rim so as to be communicatively connected to a downstream side flow path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.