Patent · US Active

High-precision semiconductor device probing apparatus and system thereof

US9329205B2 · kind B2 · utility

2Cited by

1References

18Claims

0Family size

Assignee

STAR TECHNOLOGIES, INC. · US

Inventors

Choon Leong Lou · Suzhou, CN
Ho Yeh Chen · Hsinchu, TW
Hsiao Ting Tseng · Hsinchu, TW

Key dates

Filing date	Mar 20, 2012
Grant date	May 3, 2016
Priority date	—
Expiry date	Aug 22, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/07357
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A high precision semiconductor probing system includes a probe head, a circuit board positioned above the probe head, and an optical microscope, wherein the probe head has a plurality of vertical probes and at least one cantilever probe having a vertical body positioned therein. The cantilever probe is disposed close to an edge of the probe head and extends laterally out from the probe head, in order to facilitate the visual alignment viewing from top of the probing apparatus. The optical microscope is positioned on top of the probing apparatus and is configured to have a line of sight directed to the tip of the cantilever probe.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.