Heater unit, fan filter unit, and substrate processing apparatus
US9330948B2 · kind B2 · utility
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2References
17Claims
0Family size
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Key dates
| Filing date | Jun 21, 2012 |
| Grant date | May 3, 2016 |
| Priority date | — |
| Expiry date | Jul 1, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2203/022
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A heater unit according to an embodiment includes: a flat heater including a linear heating element arranged in a planar pattern; a first mesh body formed in a mesh pattern using a material with high heat conductivity and placed at least on one side of the flat heater facing the flat heater; and a second mesh body formed in a mesh pattern using a material with lower heat conductivity than that of the first mesh body and placed to face a surface of the first mesh body opposite to the surface of the first mesh body facing the flat heater.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.