Processing liquid for suppressing pattern collapse of fine metal structure and method for producing fine metal structure using same
US9334161B2 · kind B2 · utility
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14Claims
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Key dates
| Filing date | Sep 29, 2010 |
| Grant date | May 10, 2016 |
| Priority date | — |
| Expiry date | Oct 12, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02057
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
There are provided a processing liquid for suppressing pattern collapse of a fine metal structure, containing at least one member selected from an imidazolium halide having an alkyl group containing 12, 14 or 16 carbon atoms, a pyridinium halide having an alkyl group containing 14 or 16 carbon atoms, an ammonium halide having an alkyl group containing 14, 16 or 18 carbon atoms, a betaine compound having an alkyl group containing 12, 14 or 16 carbon atoms, and an amine oxide compound having an alkyl group containing 14, 16 or 18 carbon atoms, and a method for producing a fine metal structure using the same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.