Patent · US Active

Inertial sensor and method of levitation effect compensation

US9335170B2 · kind B2 · utility

0Cited by

8References

11Claims

0Family size

Assignee

Freeescale Semiconductor, Inc. · US

Inventors

Yizhen Lin · Cohoes, US
Jan Mehner · Neukirchen, DE
Michael Naumann · Feucht, DE

Key dates

Filing date	Nov 28, 2012
Grant date	May 10, 2016
Priority date	—
Expiry date	Nov 2, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/574
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An inertial sensor (110) includes a drive system (118) configured to oscillate a drive mass (114) within a plane (24) that is substantially parallel to a surface (50) of a substrate (28). The drive system (118) includes first and second drive units (120, 122) having fixed fingers (134, 136) interleaved with movable fingers (130, 132) of the drive mass (114). At least one of the drive units (120) is located on each side (126, 128) of the drive mass (114). Likewise, at least one of the drive units (122) is located on each side (126, 128) of the drive mass (114). The drive units (122) are driven in phase opposition to the drive units (120) so that a levitation force (104) generated by the drive units (122) compensates for, or at least partially suppresses, a levitation force (100) generated by the drive units (120).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.