X-ray topography apparatus
US9335282B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2013 |
| Grant date | May 10, 2016 |
| Priority date | — |
| Expiry date | Jan 12, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/062
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is an X-ray topography apparatus capable of separating a desired characteristic X-ray which enters a sample from an X-ray which is radiated from an X-ray source, and increasing an irradiation region of the desired characteristic X-ray. The X-ray topography apparatus includes: the X-ray source for radiating the X-ray from a fine focal point, the X-ray containing a predetermined characteristic X-ray; an optical system including a multilayer mirror with a graded multilayer spacing which corresponds to the predetermined characteristic X-ray, the optical system being configured to cause the X-ray reflected on the multilayer mirror to enter the sample; and an X-ray detector for detecting a diffracted X-ray. The multilayer mirror includes a curved reflective surface having a parabolic cross section, and the fine focal point of the X-ray source is provided onto a focal point of the curved reflective surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.