MEMS parameter identification using modulated waveforms
US9335340B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 23, 2013 |
| Grant date | May 10, 2016 |
| Priority date | — |
| Expiry date | Jul 15, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0834
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor system includes a microelectromechanical systems (MEMS) sensor, control circuit, signal evaluation circuitry, a digital to analog converter, signal filters, an amplifier, demodulation circuitry and memory. The system is configured to generate high and low-frequency signals, combine them, and provide the combined input signal to a MEMS sensor. The MEMS sensor is configured to provide a modulated output signal that is a function of the combined signal. The system is configured to demodulate and filter the modulated output signal, compare the demodulated, filtered signal with the input signal to determine amplitude and phase differences, and determine, based on the amplitude and phase differences, various parameters of the MEMS sensor. A method for determining MEMS sensor parameters is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.