MCU-based compensation and calibration for MEMS devices
US9335396B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2013 |
| Grant date | May 10, 2016 |
| Priority date | — |
| Expiry date | Mar 25, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C99/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor system includes a microelectromechanical systems (MEMS) sensor, a processor, measurement circuitry, stimulus circuitry and memory. The MEMS sensor is configured to provide an output responsive to physical displacement within the MEMS sensor to the measurement circuitry. The stimulus circuitry is configured to provide a stimulus signal to the MEMS sensor to cause a physical displacement within the MEMS sensor. The measurement circuitry is configured to process the output from the MEMS sensor and provide it to the processor. The processor is configured to generate stimulus signals and provide them to the stimulus circuitry for provision to the MEMS sensor. The processor is configured to monitor the output from the measurement circuitry corresponding to the physical displacement occurring in the MEMS sensor, calculate MEMS sensor characteristics based on the output, and update calibration values based on the output. Methods for monitoring and calibrating MEMS sensors are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.