Suspended membrane for capacitive pressure sensor

US9340412B2 · kind B2 · utility

Assignee

• AMS INTERNATIONAL AG · CH

Inventors

• Willem Frederik Adrianus Besling · Eindhoven, NL
• Remco Henricus Wilhelmus Pijnenburg · Veldhoven, NL
• Casper van der Avoort · Waalre, NL
• Marten Oldsen · Kleve, DE
• Martijn Goossens · Veldhoven, NL

Key dates

• Filing date: Jul 28, 2014
• Grant date: May 17, 2016
• Expiry date: Jul 28, 2034

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2201/014
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Embodiments of a method for forming a suspended membrane include depositing a first electrically conductive material above a sacrificial layer and within a boundary trench. The first electrically conductive material forms a corner transition portion above the boundary trench. The method further includes removing a portion of the first electrically conductive material that removes at least a portion of uneven topography of the first electrically conductive material. The method further includes depositing a second electrically conductive material. The second electrically conductive material extends beyond the boundary trench. The method further includes removing the sacrificial layer through etch openings and forming a cavity below the second electrically conductive material. The first electrically conductive material defines a portion of a sidewall boundary of the cavity.