Continuous scan type measuring apparatus
US9341469B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 9, 2014 |
| Grant date | May 17, 2016 |
| Priority date | — |
| Expiry date | Dec 9, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A continuous scan type measuring apparatus includes a continuous scan type optical application measuring instrument, a single-axis measuring instrument scanning stage and two carrier stages. The continuous scan type optical application measuring instrument performs a surface shape measurement of a measuring object. The single-axis measuring instrument scanning stage carries the optical application measuring instrument and causes the optical application measuring instrument to perform continuous scanning along a predetermined direction. The two carrier stages are detachably mount respective measuring objects thereon and move independently of each other. The two carrier stages are positioned independently at one of a measurement position within a scanning range of the optical application measuring instrument and a replacement position of the measuring objects. A carrier stage, which is at the measurement position and on which the measuring object subjected to the surface shape measurement is mounted, is fixed during the continuous scanning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.