Patent · US Active

Method for correcting the surface form of a mirror

US9341756B2 · kind B2 · utility

0Cited by

3References

11Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Juergen Mueller · Berlin, DE
Thomas Schicketanz · Aalen, DE
Dirk Heinrich Ehm · Beckingen, DE

Key dates

Filing date	Sep 13, 2013
Grant date	May 17, 2016
Priority date	—
Expiry date	Apr 11, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG21K1/062
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method for correcting a surface form of a mirror (1) for reflecting radiation in the wavelength range of 5-30 nm, which includes: The first group (19) of layers includes first (9) and second (11) layers arranged alternately one above another, wherein the first layers have a refractive index at the operating wavelength which is greater than the refractive index of the second layers for that radiation.The correction layer (13) is applied by:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.