Gravitation compensation for optical elements in projection exposure apparatuses

US9341807B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Norbert Muehlberger · Prien am Chiemsee, DE
• Thorsten Rassel · Wertingen, DE
• Armin Schoeppach · Aalen, DE
• Juergen Fischer · Adelsheim, DE
• Matthias Orth · Langenau, DE

Key dates

• Filing date: Sep 12, 2014
• Grant date: May 17, 2016
• Expiry date: Sep 12, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70825
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A gravitation compensator for mounting optical elements in a projection exposure apparatus and a corresponding projection exposure apparatus are disclosed. The gravitation compensator at least partly compensates for the weight force of a mounted optical element and simultaneously enables a change in the position of the optical element without the compensated weight force being altered in an impermissible manner during the change in position. This applies, in particular, to high weight forces which are to be compensated. Furthermore, the gravitation compensator enables use in different atmospheres and the compensation of corresponding aging effects.