Patent · US Active

Mask carrier, mask handling module and method for adjusting a mask

US9348237B2 · kind B2 · utility

0Cited by

24References

10Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Michael Heumüller · Hachenburg, DE
Heike Landgraf · Bruchköbel, DE
Michael König · Frankfurt, DE

Key dates

Filing date	Aug 20, 2010
Grant date	May 24, 2016
Priority date	—
Expiry date	Jul 30, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/12
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Mask carriers and mask alignment in vacuum deposition processes, mask handling modules, and methods for aligning a mask. A mask handling module can include a substrate carrier for carrying at least one substrate; a mask carrier for carrying at least two masks. The mask carrier can include at least two mask carrier sections each being adapted to carry a mask and a mask carrier positioning device for moving the mask carrier relative to the substrate carrier. The mask carrier sections are arranged so that the masks carried on the mask carrier sections can be positioned on the mask carrier in respective planes forming an angle with respect to each other so that only one of the at least two masks can be aligned to one of the at least one substrates.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.