Electrode pair fabrication using directed self assembly of diblock copolymers
US9349640B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 25, 2015 |
| Grant date | May 24, 2016 |
| Priority date | — |
| Expiry date | Jun 25, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N70/841
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Structures including alternating first U-shaped electrodes and second U-shaped electrodes and contact pads interconnecting the first and the second U-shaped electrodes are provided. Each of the first U-shaped electrodes includes substantially parallel straight portions connected by a bent portion located on one end of a substrate. Each of the second U-shaped electrodes includes substantially parallel straight portions connected by a bent portion located on an opposite end of the substrate. Every adjacent straight portions of neighboring first and second U-shaped electrodes constitute an electrode pair having a sub-lithographic pitch. Each of the contact pads overlaps and contacts the bent portion of one of the first and the U-shaped electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.