Coating apparatus with rotation module

US9353436B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Michael Koenig · Kollow, DE
• Stefan Bangert · Lauentheil, DE
• Uwe Schuessler · Aschaffenburg, DE
• Reiner Gertmann · Gelnhausen, DE

Key dates

• Filing date: Feb 18, 2009
• Grant date: May 31, 2016
• Expiry date: Aug 18, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67155
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The present invention refers to a method for coating a substrate, a coating apparatus for carrying out the method and a handling module for coating apparatuses. The handling module comprises a moveable support for a substrate to be coated the support being movable between at least two positions. Further, a mask arranging device for at least one of attaching and detaching a mask to the substrate, and a mask alignment device for aligning the mask with respect to the substrate are provided for, wherein the mask alignment device is attached to the movable support so as to be movable together with the support. Alternatively, the handling module comprises a vacuum chamber, a moveable support for a substrate to be coated, the support being arranged in the vacuum chamber and being rotatable between at least two positions, wherein a mask arranging device for at least one of attaching and detaching a mask to the substrate is arranged within the vacuum chamber of the handling module.