System and method for defect detection and photoluminescence measurement of a sample
US9354177B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 14, 2014 |
| Grant date | May 31, 2016 |
| Priority date | — |
| Expiry date | Mar 14, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0662
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Defect detection and photoluminescence measurement of a sample directing a beam of oblique-illumination wavelength light onto a portion of the sample, directing a beam of normal-illumination wavelength light for causing one or more photoluminescing defects of the sample to emit photoluminescent light onto a portion of the sample, collecting defect scattered radiation or photoluminescence radiation from the sample, separating the radiation from the sample into a first portion of radiation in the visible spectrum, a second portion of radiation including the normal-illumination wavelength light, and at least a third portion of radiation including the oblique-illumination wavelength light, measuring one or more characteristics of the first portion, the second portion or the third portion of radiation; detecting one or more photoluminescence defects or one or more scattering defects based on the measured one or more characteristics of the first portion, the second portion or the third portion of radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.