Capacitor assemblies for coupling radio frequency (RF) and direct current (DC) energy to one or more common electrodes
US9355776B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2014 |
| Grant date | May 31, 2016 |
| Priority date | — |
| Expiry date | Nov 29, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G4/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Embodiments of a capacitor assembly for coupling radio frequency (RF) and direct current (DC) power to an electrode and substrate support incorporating same are provided herein. In some embodiments, the capacitor assembly includes a first conductive plate to receive RF power from an RF power source, the first conductive plate including a central bore; at least one capacitor coupled to the first conductive plate and surrounding the central bore; and a second conductive plate electrically coupled to the first conductive plate via the at least one capacitor, the second conductive plate including an input tap to receive DC power from a DC power source and at least one output tap to couple the RF and DC power to an electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.