Pressure measuring instrument and substrate processing apparatus provided with the pressure measuring instrument
US9360390B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 8, 2014 |
| Grant date | Jun 7, 2016 |
| Priority date | — |
| Expiry date | May 4, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0636
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a pressure measuring instrument including: a detecting unit including the reference pressure chamber therein and formed in a cylindrical shape, the diaphragm being disposed inside the detecting unit; a communicating unit for providing communication between the diaphragm and the measurement pressure chamber, and formed in a circular tube shape having an inner diameter smaller than an inner diameter of the detecting unit; and an annular flow-path forming unit disposed between the detecting unit and the communicating unit, and configured to form a substantially annular path. The communicating unit introduces a gas of the measurement pressure chamber into the substantially annular path. The annular flow-path forming unit allows the gas introduced from the communicating unit to pass through the substantially annular path and to supply the passing gas to a side surface of the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.