Three-axis microelectromechanical systems device with single proof mass
US9360496B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 3, 2014 |
| Grant date | Jun 7, 2016 |
| Priority date | — |
| Expiry date | Dec 13, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0845
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical systems (MEMS) device, such as a three-axis MEMS device can sense acceleration in three orthogonal axes. The MEMS device includes a single proof mass and suspension spring systems that movably couple the proof mass to a substrate. The suspension spring systems include translatory spring elements and torsion spring elements. The translatory spring elements enable translatory motion of the proof mass relative to the substrate in two orthogonal directions that are parallel to the plane of the MEMS device in order to sense forces in the two orthogonal directions. The torsion spring elements enable rotation of the proof mass about a rotational axis in order to sense force in a third direction that is orthogonal to the other two directions. The translatory spring elements have asymmetric stiffness configured to compensate for an asymmetric mass of the movable element used to sense in the third direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.