Micromechanical component and method for producing a micromechanical component

US9360664B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Simon Armbruster · Wannweil, DE
• Helmut Grutzeck · Tübingen, DE
• Frank Schatz · Kornwestheim, DE
• Joerg Muchow · Reutlingen, DE
• Frederic Njikam Njimonzie · Reutlingen, DE
• Johannes Baader · Glückstadt, DE
• Kerrin Doessel · Stuttgart, DE
• Rainer Straub · Entringen, DE

Key dates

• Filing date: Aug 28, 2014
• Grant date: Jun 7, 2016
• Expiry date: Aug 28, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0858
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A micromechanical component and a method for producing a micromechanical component are described. The component has: a frame; a plate spring that is connected to the frame and that has a front side and a rear side facing away from the front side; a mirror element that is situated on the front side of the plate spring and is connected to the front side of the plate spring in such a way that the mirror element is suspended on the frame so as to be capable of displacement; and at least one piezoelectric strip that is connected to the rear side of the plate spring; the plate spring being elastically deformable through the application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.