Inventor · Wannweil, DE

Simon Armbruster

33Patents
4h-index
50Co-inventors
66Inventor score

Filing activity: Mar 6, 2003 → Oct 12, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7354786B2 Sensor element with trenched cavity Performing Operations; Transporting 16 Active
US8470631B2 Method for manufacturing capped MEMS components Electricity 9 Active
US7918136B2 Micromechanical sensor element Physics 8 Active
US8558327B2 Micromechanical component and corresponding production method Performing Operations; Transporting 4 Active
US8492855B2 Micromechanical capacitive pressure transducer and production method Physics 4 Active
US7494839B2 Method for manufacturing a membrane sensor Performing Operations; Transporting 4 Expired
US7647832B2 Micromechanical device and method for producing a micromechanical device Performing Operations; Transporting 2 Active
US8217476B2 Micromechanical component and method for the manufacture thereof Performing Operations; Transporting 2 Active
US7843025B2 Micromechanical semiconductor sensor Performing Operations; Transporting 1 Active
US8749013B2 Sensor and method for its production Performing Operations; Transporting 1 Active
US8530261B2 Method for producing a component, and sensor element Performing Operations; Transporting 1 Active
US9663351B2 Method for producing a wafer equipped with transparent plates Emerging Cross-Sectional Technologies 1 Active
US8148234B2 Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure Electricity 0 Active
US8519494B2 Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate Performing Operations; Transporting 0 Active
US10840107B2 Method for forming a cavity and a component having a cavity Performing Operations; Transporting 0 Active
US9764945B2 Micromechanical component and corresponding test method for a micromechanical component Performing Operations; Transporting 0 Active
US9618740B2 Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device Physics 0 Active
US7858424B2 Method for manufacturing a sensor array including a monolithically integrated circuit Performing Operations; Transporting 0 Active
US9885866B2 Mirror system and projection device Physics 0 Active
US7755152B2 Semiconductor component configured as a diaphragm sensor Performing Operations; Transporting 0 Active
US10589988B2 Mechanical component and manufacturing method for a mechanical component Emerging Cross-Sectional Technologies 0 Active
US7572661B2 Method for manufacturing a micromechanical sensor element Performing Operations; Transporting 0 Active
US10431474B2 Method for forming a cavity and a component having a cavity Performing Operations; Transporting 0 Active
US9082831B2 Component having a via Electricity 0 Active
US8389327B2 Method for manufacturing chips Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.