Nanowire-based mechanical switching device
US9362074B2 · kind B2 · utility
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8References
24Claims
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Key dates
| Filing date | Mar 14, 2013 |
| Grant date | Jun 7, 2016 |
| Priority date | — |
| Expiry date | May 13, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H9/0271
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and a suspended portion. A first gate electrode is disposed adjacent the void, and is spaced apart from the nanowire. A first conductive region is disposed adjacent the first gate electrode and adjacent the void, and is spaced apart from the nanowire.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.